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发明名称
AFM CANTILEVER
摘要
申请公布号
JPH08262040(A)
申请公布日期
1996.10.11
申请号
JP19950084478
申请日期
1995.03.17
申请人
OLYMPUS OPTICAL CO LTD
发明人
TAKAYAMA MICHIO
分类号
G01B21/30;G01N37/00;G01Q20/04;G01Q60/06;G01Q60/38;H01J37/28;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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