Einrichtung zum Halten eines Substrats,申请号DE19916021747-传众专利搜索

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发明名称	Einrichtung zum Halten eines Substrats
摘要
申请公布号	DE69121747(D1)	申请公布日期	1996.10.10
申请号	DE19916021747	申请日期	1991.03.18
申请人	CANON K.K., TOKIO/TOKYO, JP	发明人	MARUMO, MITSUJI, CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;IWAMOTO, KAZUNORI, CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;MIZUSAWA, NOBUTOSHI, CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;KARIYA, TAKAO, CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;UZAWA, SHUNICHI, CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP
分类号	H01L21/673;G03F7/20;H01L21/027;H01L21/677;H01L21/683;H01L21/687;(IPC1-7):H05K13/00;H01L21/00	主分类号	H01L21/673
代理机构		代理人
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