发明名称 Freitragende Sonde und Apparat zur Anwendung derselben
摘要 A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element. <IMAGE>
申请公布号 DE69121868(D1) 申请公布日期 1996.10.10
申请号 DE1991621868 申请日期 1991.12.13
申请人 CANON K.K., TOKIO/TOKYO, JP 发明人 YAGI, TAKAYUKI, C/O CANON KABUSHIKI KAISH, OHTA-KU, TOKYO, JP;HIRAI, YUTAKA, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;TAKAMATSU, OSAMU, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;NAKAYAMA, MASARU, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;KASANUKI, YUJI, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;YAMAMOTO, KEISUKE, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;SHIMADA, YASUHIRO, C/O CANON KABUSHIKI KAISH, OHTA-KU, TOKYO, JP;SUZUKI, YOSHIO, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP
分类号 B81B3/00;G01N27/00;G01Q10/00;G01Q10/04;G01Q60/16;G01Q70/14;G01Q80/00;G11B9/00;G11B9/14;H01J37/28;H01L21/66;H01L41/09;H01L41/22 主分类号 B81B3/00
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