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发明名称
Halbleiter-Beschleunigungsmesser
摘要
申请公布号
DE4127979(C2)
申请公布日期
1996.10.10
申请号
DE19914127979
申请日期
1991.08.23
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
TAKEUCHI, TAKANOBU, ITAMI, HYOGO, JP
分类号
G01P15/12;(IPC1-7):G01P15/09;H01L41/00
主分类号
G01P15/12
代理机构
代理人
主权项
地址
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