Adding water in plasma-aided coating process

摘要

The method concerns coating of substrates (5, 5', 5", ...) in a vacuum chamber (4) with a substrate carrier (12), means for generating coating materials from a gas phase, means for producing a plasma cloud, and pipes (19, 26) for delivery of gases. The pipe (26) for delivery of a reactive gas or a gas mixture also contains water which is partially ionised and/or partially dissociated. The resultant layers on substrates have reduced stresses and a high elasticity. Also claimed is an appts. which characterised by the presence of at least one additional pipe (26) which leads into the process chamber, is provided with a flow control unit and is connected to a water tank (34).