发明名称 Rate of flow sensor working according to thermo electric principle
摘要 A trench is positioned on the other side of the substrate, which is shorter than the substrate (3) under these resistances. The substrate is mounted on a baseplate (2), supported and connected to an inlet and outlet pipe stub (1, 7), separated by a partition (6). The positioning of the substrate on the baseplate is achieved by six stop elements (8). Openings in the pipe walls and the baseplate to the ends of the trench, result in the formation of a continuous hollow space for the liquid to be controlled. Electric wire contacts (5) are so placed around the substrate and led out of the housing (4), that a raster of 2.5 mm is maintained.
申请公布号 DE19511687(A1) 申请公布日期 1996.10.02
申请号 DE19951011687 申请日期 1995.03.30
申请人 CMS MIKROSYSTEME GMBH CHEMNITZ, 09577 NIEDERWIESA, DE 发明人 RAUCH, MANFRED, DR.-ING.HABIL., 09114 CHEMNITZ, DE;NGUYEN, NAM TRUNG, DIPL.-ING., 09126 CHEMNITZ, DE;KIEHNSCHERF, RICHARD, DR.-ING., 09123 CHEMNITZ, DE
分类号 G01F1/684;G01F5/00;(IPC1-7):G01F1/684;G01F1/692;H01L49/00 主分类号 G01F1/684
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