Verfahren zur Herstellung einer Mikrokühleinrichtung

摘要

The invention relates to a microcooling device and to a method for the production thereof. The microcooling device is designed for the heat-conducting external accommodation of electronic components 1 and has in its interior a channel structure 13 through which coolant e.g. water can flow. The channel structure is formed by a base substrate 14 having recesses and ribs 15 and a cover layer 11 made from an electrically insulating and heat-conducting material e.g. polycrystalline diamond, for direct mounting of the electronic components. In other arrangements, cover layers 14 are provided on both faces of the base substrate and the ribs 15 may be replaced by pillar-like spacers. The channel structure is made by wet chemistry techniques.