Method for collecting impurities in atmosphere by slate and apparatus for analyzing the same in real time,申请号GB19960017657-传众专利搜索

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发明名称	Method for collecting impurities in atmosphere by slate and apparatus for analyzing the same in real time
摘要
申请公布号	GB9617657(D0)	申请公布日期	1996.10.02
申请号	GB19960017657	申请日期	1996.08.23
申请人	SHARP KABUSHIKI KAISHA	发明人
分类号	G01N1/02;G01N1/22;G01N1/24;G01N1/40;G01N33/00;H01L21/02	主分类号	G01N1/02
代理机构		代理人
主权项
地址

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