Electron beam exit window

摘要

PCT No. PCT/DE93/00402 Sec. 371 Date Feb. 17, 1995 Sec. 102(e) Date Feb. 17, 1995 PCT Filed May 3, 1993 PCT Pub. No. WO93/26032 PCT Pub. Date Dec. 23, 1993An electron beam exit window, known as Lenard window, has a beam exit opening which is closed in a vacuum-tight manner by a metal foil. Resting on the metal foil on the vacuum side is a supporting grid of heat-proof fiber bundles. The supporting grid is fixed in a frame. The electron beam exit window is particularly suitable for relatively low electron energies with a high power density of the electron beam. This provides an easily manufactured window with low absorption.