发明名称 SAMPLE HOLDER OF SECONDARY ION MASS-SPECTROMETRIC DEVICE OF DOUBLE CONVERGING TYPE
摘要 PURPOSE: To provide an accurate measuring result without causing bend or warp in a sample holding plate or shortage in the sample holding force originating from differing thickness of sample from piece to piece. CONSTITUTION: A holder for secondary ion mass-spectrometric device of double convergence type is configured so that a sample 4 is pressed to a sample holding plate 2 by a pressing member 6, in which a holding member 3 to support the base end of the pressing member 6 is arranged adjustable so that the member 3 approaches and separates to/from the sample holding plate 2. The pressing force of the pressing member 6 for the sample 4 (to the plate 2) can be thereby maintained constant at all times despite varying thickness of the sample 4.
申请公布号 JPH08254488(A) 申请公布日期 1996.10.01
申请号 JP19950058963 申请日期 1995.03.17
申请人 NEC CORP 发明人 OOSUGI MINA
分类号 G01N23/225;G01N1/28;G01N27/62;H01J37/20;H01J49/32 主分类号 G01N23/225
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