METHOD AND EQUIPMENT TO IDENTIFY SAMPLE AT NANOMETER SCALE AND TO DECIDE PROPERTY

摘要

PROBLEM TO BE SOLVED: To investigate the characteristics under the surface of a sample on a nanometer scale. SOLUTION: The optical thermal effect of a sample 10 is detected and analyzed for performing the identification and the characteristic analysis of a sample 10. A light beam 32 emitted from a light source is cast on the sample 10. The sample 10 absorbs the light beam 32, and the temperature rising of the sample 10 and the increase in size occur. For defining the characteristics of the sample 10, the tip of an atomic probe detects the temperature rising of the sample 10 and the increase in size. The characteristics of the sample 10 are used for the identification of the property of the sample 10.