| 摘要 |
PURPOSE: To obtain a ultrafine wiring by realizing a wiring having significantly low electric resistance using a material exhibiting superconductivity only in one axial direction through the use of ladder lattice. CONSTITUTION: A superconducting wiring 11 is employed for interconnecting the diffusion layers 13 in an electronic element 12. The wiring 11 is obtained by patterning a crystal having Sr-CuO face structure along the direction of a-axis with a predetermined width. Since the direction of a ladder lattice depends on the orientation of an underlying place, the orientation of the underlying plane is selected such that the arrow represents the direction of a-axis. Preferably, a plurality of ladder lattices are connected between the regions for connecting the superconducting wiring in the axial direction, but the patterning and the deposition of film may be shifted obliquely in a predetermined virtual direction so long as two regions are connected through at least one ladder lattice. |
