| 摘要 |
PURPOSE: To obtain an acid mist sensor whose structure is simple and by which an acid mist can be detected with high sensitivity. CONSTITUTION: An acid mist sensor is constituted of a substrate (a) which is formed of silica or the like, of a diamond thin film (b) which is deposited and formed on the substrate (a) by a CVD method and of one pair of electrodes (c) which are formed on the diamond thin film (b) by keeping a prescribed interval. The diamond thin film (b) is a so-called i-type diamond thin film which is not doped with impurities, and the pair of electrodes (c) are formed in such a way that a metal such as gold or the like is vapor-deposited on the diamond tin film (b). |
