发明名称 TABLE MOVING DEVICE
摘要 <p>PURPOSE: To provide a table moving device which can be improved in durability by suppressing the increase in wear and damage owing to an excessive slide between a roller and a rod as much as possible. CONSTITUTION: The device has the rod 6 which is clamped between a 1st roller 4 and a 2nd roller 5 and can move in a specific direction through the rotation of the roller 5 and a rotational position detecting means 15 which detects rotation information on a rotary driving means 12 rotating the 2nd roller 5. Further, the table moving device consists of a moving body position detecting means 17 which obtains position information on the rod 6, a deviation detection means 19 which calculates the deviation between the rotational position information on the 2nd roller 5 and the position information 16 on the moving body, and a comparing means 21 which decides the slide state between the 2nd roller 5 and rod 6 from the deviation quantity; and the wear and damage owing to the contact between the 2nd roller 5 and rod 6 are prevented to improve the durability of the table moving device.</p>
申请公布号 JPH08255022(A) 申请公布日期 1996.10.01
申请号 JP19950058402 申请日期 1995.03.17
申请人 TOSHIBA CORP 发明人 KOBAYASHI NOBORU;AKENO MASANOBU
分类号 G12B5/00;B23Q5/36;G05D3/12;H01L21/027;H01L21/68;(IPC1-7):G05D3/12 主分类号 G12B5/00
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