ULTRASONIC WAVE TRANSDUCER AND ITS MANUFACTURE

摘要

PURPOSE: To enhance the degree of freedom of the shape by curing photo-setting resin mainly using a piezoelectric material as its filler through light irradiation so as to easily obtain a required thickness and to cure the photo-setting resin on other components. CONSTITUTION: Baked piezoelectric ceramics is pulverized to form filler powder, blended in photo-setting fluid resin by using a kneader to form a mixture 1. A rear dumping member 4 whose front side is formed in advance with a rear electrode 3 is placed in a stainless steel or glass case 2 provided with a heater and whose temperature is kept to a setting temperature. Then the mixture 1 is put in the case 2 and the level of liquid is adjusted so that an interval between the liquid level of the mixture 1 and the rear electrode 3 is a thickness (t) of the piezoelectric element to be formed. An ultraviolet ray irradiation device 11 scans and applies irradiation to a range in which the piezoelectric element is to be formed. Only the exposed part of the mixture 1 is changed into a solid and a composite piezoelectric body comprising the rear dumping member 4 and the rear electrode 3 integrated with each other is obtained by rinsing and removing the uncured part.