| 发明名称 |
OXIDE - CAPPED TITANIUM SILICIDE FORMATION |
| 摘要 |
A cap oxide (or oxide/nitride) prevents silicon outdiffusion during the reaction step which forms direct-react titanium silicide. |
| 申请公布号 |
KR960013135(B1) |
申请公布日期 |
1996.09.30 |
| 申请号 |
KR19870001996 |
申请日期 |
1987.03.06 |
| 申请人 |
TEXAS INSTRUMENTS INC. |
发明人 |
HOROUEI, TOOMASU SHII;TANGU, TOOMASU - II;UEI, CHIE - CHIA;HAKEN, ROGER A.;BELL, DAVID A. |
| 分类号 |
H01L21/28;H01L21/283;H01L21/285;H01L21/3205;H01L21/336;H01L21/768;H01L23/52;H01L29/78;(IPC1-7):H01L21/28 |
主分类号 |
H01L21/28 |
| 代理机构 |
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代理人 |
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| 地址 |
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