摘要 |
<p>PURPOSE: To obtain a high resistance element wherein the variation of resistance value in a chip is restrained to a minimum, and provide a semiconductor element wherein the high resistance element is integrated, by constituting a spiral type configuration by using polycrystalline silicon of a sheet resistor having a low resistance value. CONSTITUTION: Terminals 11 on both ends of a belt of polycrystalline silicon 1 are arranged on a diagonal line. This example shows a resistance element constituting a square spiral.</p> |