发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE: To make the cavity size of an aperture approximate to the semiconductor size, by printing a wiring pattern on a green sheet, baking a green sheet group, and forming an aperture for inserting a semiconductor element, in a green sheet in which an aperture is not formed. CONSTITUTION: Ceramics powder is compound with glass componentpigment component and organic solvent component, and a green sheet is formed by using a doctor phrase method or the like. After viaholes for wiring or the like are formed by a pressing method or the like, the inner electrode of a package is formed by a screen printing method of conductor paste. After two green sheets are laminated, they are bonded with pressure without forming an aperture for a cavity part 2, and subjected to ceramic baking. After baking, the cavity part 2 for inserting a semiconductor element is formed in the green sheet. A package is formed by soldering outer leads 3 and plating the sheath.</p>
申请公布号 JPH08250617(A) 申请公布日期 1996.09.27
申请号 JP19950050265 申请日期 1995.03.10
申请人 NEC CORP 发明人 SUGAWARA KENJI
分类号 H01L21/60;H01L23/04;H01L23/049;H01L23/08;H01L23/10;H01L23/13;H01L23/36;H01L23/498;(IPC1-7):H01L23/04 主分类号 H01L21/60
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