| 摘要 |
<p>PURPOSE: To obtain a high-quality optical film and, at the same time, to improve the efficiency of a film forming jig at the time of forming a film by using an ion assist method by making the jig to be able to be held without applying any force to a semiconductor laser and semiconductor laser bar. CONSTITUTION: A film forming jig is provided with a hook structure 2 having hooks 2A which lock both ends of the film forming surface 3A of a semiconductor laser bar 3 to prevent the bar 3 from falling while the bar 3 is set with the surface 3A down at the time of forming an optical film of TiON, etc., on, for example, the light emitting surface, namely, cleavage plane of a semiconductor laser.</p> |
