| 摘要 |
<p>PURPOSE: To enlarge the range of measurement and to enhance the accuracy for measurement in a small flow rate range in particular by using a plurality of flow speed sensors so as to enhance the accuracy for measurement. CONSTITUTION: A flowmeter is composed of a duct part 11 having a rectangular cross-sectional shape, through which gas (a) flows, flow speed sensors 121 to 123 attached to one side wall surface 11a of the duct part 11, and flow rate sensors 131 to 133 attached to the other side wall surface 11b of the duct part 11. When gas (a) flows through the duct part 11, the flow speed sensors 121 to 123 , 131 to 133 detect flow rates of the gas at detecting parts 141 to 143 , 151 to 153 of the duct part. An averaged flow speed is computed from detection signals from the sensors, and a flow rate is computed from the averaged flow speed.</p> |
