发明名称 SEPARATION LIQUID FOR RESIST HARDENED FILM
摘要 PURPOSE: To make separated pieces fine, reduce the blinding of a metal net and shorten a separation time by containing water, alkaline metal hydroxide and water miscible organic solvent. CONSTITUTION: Separation liquid is to separate a hardened film, which is obtained by holding light polymerized composition of an alkaline water solution development type on a substrate to be hardened by active beam, from the substrate, contains water, alkaline metal hydroxide and water miscible organic solvent. Water is not specified, including city water, distilled water, ion exchanged water and industrial water, independently used or mixed. For alkaline metal hydroxide, caustic soda, caustic potash or, etc., is used. For water miscible organic solvent, ethylene glycol monoether, diethylene glycol monoether. triethylene glycol monoether or, etc., is independently used or mixed one another.
申请公布号 JPH08248645(A) 申请公布日期 1996.09.27
申请号 JP19950051379 申请日期 1995.03.10
申请人 MITSUBISHI RAYON CO LTD 发明人 YANAGASE AKIRA;FUJIWARA TADAYUKI;OTANI HIROYUKI
分类号 G03F7/42;(IPC1-7):G03F7/42 主分类号 G03F7/42
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