发明名称 DEVICE FOR MEASURING ELECTROPHYSICAL CHARACTERISTICS OF SEMICONDUCTOR PLATES
摘要 FIELD: measurement technology. SUBSTANCE: device has two modulated optical radiation sources, optical coupling elements, photodetector, focusing element, microscope stage, photo-emf sensor with capacitive coupling electrode and preamplifier, two power amplifiers, two-channel generator, two recorders. Device may have two synchronous detectors, differential amplifier, unmodulated radiation source for illuminating object under check, and also more than two radiation sources and electronic units. Lasers and/or light-emitting diodes may be used as radiation sources. EFFECT: improved reliability of device. 7 cl, 4 dwg
申请公布号 RU94028407(A) 申请公布日期 1996.09.27
申请号 RU19940028407 申请日期 1994.07.28
申请人 OBSHCHESTVO S OGRANICHENNOJ OTVETSTVENNOST'JU "ITAR" 发明人 FAJFER V.N.;PETROSJAN E.R.;DJUKOV V.G.;PRAVDIVTSEV A.E.;JAKUSHIN V.K.
分类号 H01L21/66 主分类号 H01L21/66
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