METHOD FOR DETERMINING CONCENTRATION OF MOBILE CHARGE CARRIERS IN SEMICONDUCTORS

摘要

FIELD: semiconductor materials technology; determining electrophysical properties of semiconductor materials. SUBSTANCE: specimen is evacuated. Exoelectronic emission current as function of temperature is determined while slowly heating specimen and treating surface with ultraviolet rays. Specimen is slowly cooled down to initial temperature. Exoelectronic emission as function of temperature is determined again under same conditions with surface treated by infra-red rays with known density of light flux. Two functions are compared. Temperature at which functions coincide is determined and required parameter is calculated including this temperature and flux density. EFFECT: facilitated procedure. 3 dwg