| 摘要 |
<p>PURPOSE: To secure the matching between the actual work progress information and the calculation result of a starting job. CONSTITUTION: A semiconductor production plant 20 includes the manufacture devices 19a to 19d and the carrier paths 18a to 18c which connect the devices 19a to 19d together. The work progress information of each of the manufacture devices 19a to 19d is outputted to a lot progress/control subsystem 17, and the control signals of devices 19a to 19d are inputted from the subsystem 17. A production controller 100 includes an input/output interface 1 which inputs and outputs data to and from the subsystem 17, a ROM 4 which stores a control program, a rewritable RAM 3 which stores the momentary work progress information, a production plan, etc., received from the interface 1, and an arithmetic processor 2 which produces a work program and calculates a starting job based on the data stored in the RAM 3 and the program stored in the ROM 4.</p> |
