| 摘要 |
<p>PURPOSE: To provide an electronic device with micro-cathodes high in performance and efficiency, in which the aspect ratio of the outer profile of the whole of an emitter is furthermore larger than 0.7 through 1.2, the radius of curvature at its tip end section is sufficiently small and sharp, and the device is excellent in electron emitting characteristics. CONSTITUTION: On one side of a monocrystal Si substrate 1, a recessed section 2 is engraved, in which its side surfaces faced to each other are parallel or inclined to an angle less than 70 deg., and the section is long in lengthwise in the depth direction, the surface of the monocrystal Si substrate 1 including the inside of the recessed section 2 is oxidized, the side surfaces of the recessed section 2 are grown to the inner side of the recessed section 2 from its original position because of oxidization, and these side surfaces are thereby hit against each other, as a result, the cavity of the recessed section 2 is thereby sharpened toward its bottom. Emitter material layers 4 are piled up at the cavity of the recessed section 2, and an emitter 8 can thereby be formed therein, which is sharp, high in an aspect ratio, and excellent in an electric field concentration effect.</p> |
