| 摘要 |
<p>PURPOSE: To lessen its electric conductivity change with the lapse of time of a thin film despite high sheet resistance by producing the film from oxides containing In and Zn as main cation elements and specifying the range of the thickness of the film. CONSTITUTION: An input panel 1 is provided with a transparent supporting substrate 2 made of acrylic resin, a fixed side transparent electrode substrate 3 fixed on the substrate 2, and an input side transparent electrode substrate 4 put above the substrate 3. The transparent electrode films 3a, 4a on the substrate 3 and the substrate 4 are made of oxides containing In and Zn as main cation elements and the thickness of the films is set to be 50-500Å. The transparent electrode films are preferably contains In in 0.55-0.9 In/(In+Zn) atomic ratio. The relative oxygen content ratio of the transparent electrode films is preferably 0.6-0.99.</p> |
