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发明名称
ELECTRON BEAM GENERATING METHOD
摘要
申请公布号
JPH08250299(A)
申请公布日期
1996.09.27
申请号
JP19950080844
申请日期
1995.03.14
申请人
AGENCY OF IND SCIENCE & TECHNOL;KAWASAKI HEAVY IND LTD
发明人
YOKOYAMA MINORU;KAWAI MASAYUKI;HAMADA SHINJI;YAMAZAKI TETSUO;MISUMI TOMOHISA;YAMADA YAKAMASA
分类号
H05H7/08;H01J37/06;H05H9/00;H05H13/04;(IPC1-7):H05H9/00
主分类号
H05H7/08
代理机构
代理人
主权项
地址
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