Infrarot-Detektor mit einer Brückenstruktur

摘要

An infrared sensor has a bridge portion which bridges a cave portion formed in a sensor substrate. The bridge portion comprises an infrared receiving portion and supporting portions for supporting the infrared receiving portion. The plane shape of the infrared receiving portion is a square or a circle which has a greater side length or a greater diameter than the width of the supporting portions to increase the amount of infrared received by the infrared receiving portion.