Mikrofokus-Röntgeneinrichtung

摘要

In a microfocus X-ray device for producing short-exposure X-ray images to be enlarged, a focused electron beam used for producing the X-radiation (16) strikes the braking material of a target (23). This causes the braking material to change to the fluid aggregate state in the focus point (22) as a result of the high thermal load. For that reason, the device is operated in pulse mode, and the position of the focus point (22) on the target (23) is changed for each electron bombardment. The braking material is located in a braking layer (32) on a support layer (33) and the electrode beam (16) impinges vertically on the braking layer (32) which is aligned with the electron beam (16). A control action interrupts the exposure at the latest when the support layer (33) starts to melt.