METHODS AND APPARATUS FOR DEPOSITING BARRIER COATINGS.

摘要

A barrier coating is formed on a polymeric article, such as on the interior of a thermoplastic container. An oxidizing gas is converted to a plasma in a plasma chamber remote from the treatment chamber. The resulting plasma-activated oxidizing species are delivered to the interior of the container. An organosilicon reactant vapor is separately but simultaneously delivered to the interior of the container so that the organosilicon vapor and oxidizing active species mix within the container. An electric field is also applied to the container, so that the reaction products are deposited under the influence of the electrical field to form the barrier coating.