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经营范围
发明名称
APPARATUS FOR HEATING OR COOLING WAFERS
摘要
申请公布号
EP0733130(A1)
申请公布日期
1996.09.25
申请号
EP19950904908
申请日期
1994.12.15
申请人
BROOKS AUTOMATION, INC.
发明人
HENDRICKSON, RUTH ANN;HOFMEISTER, CHRISTOPHER;MUKA, RICHARD S.
分类号
C23C16/458;C23C16/46;C23F1/08;C23F4/00;C30B25/10;C30B31/12;H01L21/00;H01L21/324;H01L21/683;(IPC1-7):C23C16/00;C23F1/02
主分类号
C23C16/458
代理机构
代理人
主权项
地址
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