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发明名称
Positive resist composition
摘要
申请公布号
EP0510670(B1)
申请公布日期
1996.09.25
申请号
EP19920107033
申请日期
1992.04.24
申请人
SUMITOMO CHEMICAL COMPANY, LIMITED
发明人
UETANI, YASUNORI;DOI, YASUNORI;HASHIMOTO, KAZUHIKO;OSAKI, HARUYOSHI;HANAWA, RYOTARO
分类号
G03F7/004;G03F7/022;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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