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发明名称
摘要
申请公布号
JP2537191(B2)
申请公布日期
1996.09.25
申请号
JP19860073095
申请日期
1986.03.31
申请人
CANON KK
发明人
ISHIHARA SHUNICHI
分类号
H01L31/0248;C23C16/24;C23C16/26;C23C16/30;C23C16/44;C23C16/455;C23C16/52;H01L21/205;H01L31/08;(IPC1-7):C23C16/44
主分类号
H01L31/0248
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