发明名称 Rapid response vapor source
摘要 The apparatus is a rapid response evaporator for material deposition in vapor. The structure is a vessel which is heated to a temperature just above the melting temperature of the liquid which it contains. Inserted into the heated liquid is a funnel shaped evaporator structure in which the vertical tube is a capillary structure to raise the heated liquid from the vessel. The upper diverging portion of the evaporator contains a porous capillary interior coating in contact with the capillary tube, and the exterior is independently heated. Because of the low thermal mass of the upper portion of the evaporator and the liquid in its capillary structure, it can respond to heat changes quickly enough to rapidly vary the rate of evaporation and the thickness of the deposited coating.
申请公布号 US5558720(A) 申请公布日期 1996.09.24
申请号 US19960584288 申请日期 1996.01.11
申请人 THERMACORE, INC.;PENNSYLVANIA STATE RESEARCH FOUNDATION 发明人 SARRAF, DAVID B.;MILLER, DAVID L.
分类号 C23C14/24;C30B23/06;(IPC1-7):C23C14/00 主分类号 C23C14/24
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