| 摘要 |
PURPOSE: To make no need of hands and improve the work efficiency by successively store substrates, on which a film is formed in a rotary coating part, into a substrate storing port by a substrate apparatus robot and setting a plurality of substrates as one unit in a batch treatment part. CONSTITUTION: Substrates 1 are transported one by one by a substrate transporting robot 21 and coated with a coating liquid in a rotary coating part 20. Then, the substrates are heated in a heating treatment plate 27 to evaporate solvent components in the coating liquid. After that, the substrates are stored one by one by a second substrate setting robot 38 in a substrate storage port 35 of a substrate recovery part 30. Next, the substrate storage port 35 of the substrate recovery part 30 is set in a vertical thermally treating furnace 46 to carry out batch-thermal treatment for the substrates. The substrates 1 after the thermal treatment are returned for every substrate storage port 35 to the substrate recovery part 30 by a port transporting robot 42 and further returned to a substrate supplying part 10 through a second substrate setting robot 38 and the substrate transporting robot 21. |
