发明名称 Method for ball bumping a semiconductor device
摘要 A ball bump is formed on a semiconductor die (12) by lowering a capillary (18) and a conductive wire (20) having a ball (30) formed at its end toward the die. The ball is pressed against a bond pad (14) of the die to form a ball bond (32). The capillary is then raised and horizontally displaced without breaking the wire. The capillary is then lowered such that one side of a bottom face (22) of the capillary is used to flatten the ball bond to form a flattened ball bump (38). In lowering the capillary, an entire width (W) of the bottom face lies over and is in contact with the entire top surface of the ball bump, and a chamfer (26) and feed hole (24) are located at or beyond a perimeter of the ball bump. The wire is then clamped and the capillary raised to break the wire from the ball bump.
申请公布号 US5559054(A) 申请公布日期 1996.09.24
申请号 US19940363112 申请日期 1994.12.23
申请人 MOTOROLA, INC. 发明人 ADAMJEE, WASEEM
分类号 H01L21/60;H01L23/485;(IPC1-7):H01L21/60 主分类号 H01L21/60
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