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发明名称
PRODUCTION OF FIELD EFFECT MOS SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5365083(A)
申请公布日期
1978.06.10
申请号
JP19760140872
申请日期
1976.11.22
申请人
NIPPON ELECTRIC CO
发明人
GOTOU HIDETO
分类号
H01L29/78;H01L21/265;H01L21/28;H01L21/316;H01L21/3205
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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