| 摘要 |
PURPOSE: To obtain an acidic water for cleaning a semiconductor and a hydrogen peroxide water with low power consumption and high electrolytic efficiency by using a cation exchange membrane and a noble metal anode in a two cell type high molecular solid electrolytic cell. CONSTITUTION: The electrolytic cell 1 is constituted of the cation exchange membrane 2, gaskets 3, 4 for holding the membrane, an anode chamber wall plate 5 and a cathode chamber wall plate 6, which are placed opposite to each other and substantially in contact with the cation exchange membrane 2. The cathode chamber wall plate 6 has a function for passing a catholyte and an oxygen-containing gas, the anode chamber wall plate 5 has a function for passing an anolyte, a porous anode composed of a platinum group metal or a platinum metal group oxide is provided on the anode surface of the cation exchange membrane 2 in close contact state and the other hand, a porous cathode 5 composed of platinum is provided on a cathode surface. An improved water is produced by electrolyzing while supplying an electrolyte containing an acid and a non-metallic salt from an anode chamber inlet 12 and the oxygen- containing gas from a cathode chamber inlet 16 and the improved water having the oxidation-reduction potential of 1000mV and pH<=3 and the hydrogen peroxide are obtained in the anode chamber and in the cathode chamber, respectively. |
