| 摘要 |
A three axis control for a machine tool which maintains a plane surface being ground or machined by a tool at a desired orientation. A base supports an intermediate plate on flexures, and the position of the intermediate plate in a plane parallel to the base is controlled by a pair of actuators that are spaced apart along a line that is parallel to the direction of movement of the intermediate plate and a workpiece past the tool. Sensors move along a planar reference surface as the intermediate plate moves and sense deviations of the intermediate plate from a straight line and control the actuators to maintain the intermediate plate in its desired path through closed loop control. The workpiece to be worked on is preferably mounted on a tooling plate that in turn is mounted on the intermediate plate about an axis parallel to the line of movement. The position of the tooling plate about the axis is sensed by a third sensor operating on the reference surface to control an actuator that in turn controls position of the tooling plate about the axis. The sensors and controlled actuators insure that the surface of the workpiece will be planar, that is, straight and flat.
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