| 摘要 |
PCT No. PCT/JP94/00114 Sec. 371 Date Aug. 29, 1994 Sec. 102(e) Date Aug. 29, 1994 PCT Filed Jan. 28, 1994 PCT Pub. No. WO94/17363 PCT Pub. Date Aug. 4, 1994An angular velocity sensor arranged to minimize the influence of viscous resistance of gases in association with a vibratory member, and to enhance the sensitivity of angular velocity detection through reduction of noises. The angular velocity sensor includes a first vibratory member supported on a first support beam for vibration in horizontally lateral direction perpendicular to the support axis, a second vibratory member horiztonally supported through a second support beam at a position on the support axis and inward of the first vibratory member for vibrations in the horizontally lateral direction and at the same time in the vertical direction to the face of an upper substrate, and a vibration generating means for imparting vibrations to the first and second vibratory members in the horizontally lateral direction. With these arrangements, when a turning moment about the support axis is applied, the second vibratory member is displaced in the vertical direction under the influence of Coriolis force, and an angular velocity signal indicative of this displacement is produced by a displacement detector.
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