| 摘要 |
<p>A linear motor system for providing XY motion comprises a first linear motor (10) directed for effecting movement of a first element (11) in a first of two orthogonal directions. There is second motor (12) directed for effecting movement of a second element (13) in a second of the orthogonal directions. The motors are mounted on a base (14) such that the elements (11 and 13) are located and movable in a single plane in the respective orthogonal directions relative to each other over the base (14). A shuttle (16) is reactive with the two elements (11 and 13) such that movement of the elements effects XY movement of the shuttle (16). The elements (11 and 13) and the shuttle (16) are mounted on air bearings (200, 201, 202) and interaction of the shuttle (16) with the elements (11 and 13) is also through air bearings (206) to control angular movement of the shuttle (16). This system provides for very fine movement in an XY direction which can be precisely controlled while angular movement of the shuttle (16) is prevented.</p> |
