MECHANICAL RESONANCE, SILICON ACCELEROMETER

摘要

A silicon accelerometer includes several silicon layers. The silicon layers form two silicon beams supported by flexure members. An accelaration responsive silicon mass is arranged to bend the flexure members in response to accelerations. The silicon beams are vibrated in vacuum chambers and gas damping is provided for the acceleration responsive mass and the flexure members. Sensing electronics detect vibration of the two silicon beams.