Prodn. of tip used in optical electron beam scanning microscope

摘要

Prodn. of a tip comprises: (a) applying a masking layer (3) on a tip material layer (2); (b) producing a masking structure (4a) from the masking layer; (c) forming the tip (1) under the masking structure (4a) by isotropic plasma etching the tip material layer (2); and (d) removing the masking structure (4a) by rinsing, removing varnish or etching. Also claimed are methods for the mfr. of a microscope bar with an integrated tip.