发明名称 Glove box for clean-room operations, e.g. semiconductor mfr.
摘要 An arrangement for carrying manipulation of an object under clean room conditions in an enclosure (4) accessible through built-in gloves (3) and connected to an inert gas circulation system (9, 10, 12, 13) has a section of flexible hose (16) attached to the suction connection (17) for the inert gas. The free end (20) of the hose is open and nozzle-shaped with a reduced opening, and a filter (18) can be inserted between the hose and the suction connection.
申请公布号 DE19510857(A1) 申请公布日期 1996.09.19
申请号 DE19951010857 申请日期 1995.03.17
申请人 HEINRICH-HERTZ-INSTITUT FUER NACHRICHTENTECHNIK BERLIN GMBH, 10587 BERLIN, DE 发明人 EBERT, WILLI, DIPL.-ING., 13349 BERLIN, DE;WOLFRAM, PETER, DIPL.-CHEM., 10719 BERLIN, DE
分类号 B01D46/10;B25J21/02;(IPC1-7):B25J21/02;B01D35/02;B01D46/42;B25J1/08;H01L21/18 主分类号 B01D46/10
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