Glove box for clean-room operations, e.g. semiconductor mfr.
摘要
An arrangement for carrying manipulation of an object under clean room conditions in an enclosure (4) accessible through built-in gloves (3) and connected to an inert gas circulation system (9, 10, 12, 13) has a section of flexible hose (16) attached to the suction connection (17) for the inert gas. The free end (20) of the hose is open and nozzle-shaped with a reduced opening, and a filter (18) can be inserted between the hose and the suction connection.
申请公布号
DE19510857(A1)
申请公布日期
1996.09.19
申请号
DE19951010857
申请日期
1995.03.17
申请人
HEINRICH-HERTZ-INSTITUT FUER NACHRICHTENTECHNIK BERLIN GMBH, 10587 BERLIN, DE