Trägerkassette für Siliziumscheiben

摘要

A small boat intended to receive semiconductor wafers in vertical position. This boat comprises a cradle (20) in the form of a hollow half-cylinder with a horizontal axis; two grooved plates (21a, 21b) arranged against the side walls of the cradle (20) for receiving the wafers of semiconductor to be processed, these two plates being independent from one another and bearing on the cradle without being attached thereto; and a horizontal plate (23) allowing the two grooved plates to be supported and acting as a removable guide during the loading of the semiconductor wafers.