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发明名称
摘要
申请公布号
JP2535733(B2)
申请公布日期
1996.09.18
申请号
JP19840191115
申请日期
1984.09.12
申请人
KOGYO GIJUTSUIN
发明人
SEKYA TADASHI;TSUZUKI AKIHIRO;TORII YASUYOSHI
分类号
H01L31/0264;H01L31/032;H01L31/08;H01L31/18;(IPC1-7):H01L31/026
主分类号
H01L31/0264
代理机构
代理人
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