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发明名称
Process and apparatus for preparing superconducting thin films.
摘要
申请公布号
EP0462902(B1)
申请公布日期
1996.09.18
申请号
EP19910401673
申请日期
1991.06.20
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
HATTORI, HISAO,;HARADA, KEIZO ,;ITOZAKI, HIDEO,
分类号
H01L39/24;(IPC1-7):H01L39/24
主分类号
H01L39/24
代理机构
代理人
主权项
地址
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