| 摘要 |
PURPOSE: To provide a dislocation detecting method by which both the inclina tion angle of an object and the dislocation in the X-Y direction can be accurate ly detected. CONSTITUTION: As a pretreatment, two model regions such as the vertexes on a diagonal line are determined with regard to the image data that have been obtained by picking up the image of a normal object, and the central point thereof is obtained, and then the coordinates (Xc,Yc) of the middle point of the line segment connecting both the central points and the inclination θ0 are obtained, and they are registered as reference values (ST11 to 14). Further, model images for each rotational angle obtained by rotating the images of the model region by a prescribed angle are produced and registered. In the actual search treatment, the matching with the model images of the respective rotational angles is achieved, and the above two model regions are detected, and a line segment connecting the central points thereof is drawn, and then the middle-point coordinates (X'c, Y'c) and the inclination θ'0 are obtained. Then, the differences between the respective obtained values and the reference values are made to be the respective displacement (ST15 to 17). |
