| 摘要 |
PURPOSE: To miniaturize an optical amplifier and realize a multi-function by a method wherein an optical wave guide is provided in a substrate that rare- earth element ions are added into an electric optical crystal, and an optical active element is provided on the substrate. CONSTITUTION: Nd is adhered to a -Z surface of an electric optical crystal of an electric optical crystal substrate 1 by vacuum evaporation. Thereafter, Nd is heat-diffused in the substrate 1 in an oxygen atmosphere to form a Nd added layer 3. Au/Cr is performed sputtering on a surface of the substrate 1 diffusing Nd and selectively etched, whereby wave guide patterns including two branch optical circuits are widowed. Thereafter, the substrate 1 is soaked in pyrophosphoric acid to make a proton switching optical wave guide (ascending portion) 4, and after all Au/Cr masks are removed by etching, annealing is performed in the air. An ITO electrode 5 is performed of sputtering in each of branch parts of the optical wave guide 4 made, so that an optical integrated circuit element formed with an optical switch circuit on the substrate 1 can be made. |
