Voltage programmable link having reduced capacitance

摘要

A voltage programmable link structure reduces parasitic capacitance by using ion implantation. The voltage programmable link structure includes a first conductive element placed over a substrate. A transformable insulator is deposited over the first conductive element. The transformable insulator material is deposited with an ion implanted layer. A second conductive element is deposited over the ion implanted layer. An electrical path is formed between the first and second conductive elements by applying a voltage between the elements across at least one region of the insulator, such that the insulating material is transformed and rendered conductive to form an electrical signal path.